M.Balaceanu, M.Braic, V.Braic, C.C.Negrila, Surface chemistry of plasma deposited ZrC hard coatings, J.Optoelectron.Adv.Mater. 7/5 (2005) 2557-2560

 

Title: Surface chemistry of plasma deposited ZrC hard coatings

Abstract: X-ray Photoelectron Spectroscopy (XPS) was used to investigate the chemical state of ZrC coatings deposited by cathodic arc method. A chemistry model of the ZrC films has been proposed. It was pointed out that on the films surface a highly oxidized passive layer, containing also carbon and oxygen as contaminants, was formed. The film bulk was composed by a mixture of ZrC (the dominant phase), ZrO2 and free carbon.

Key words: ZrC coatings; cathodic are deposition; chemical composition; XPS