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D. Savastru, D. Tenciu, C. P. Lungu, M. Osiac, C. Viespe, C. Grigorescu, R. Iordanescu, I. D. Feraru, V. Ionescu, O. Monnereau, L. Tortet, R. Notonier, PZT films prepared by TVA and PLD from PbO(2):TiO(2):ZrO(2) (1:1:1) nanoceramic targets, Dig. J. Nanomater Bios. Digest Journal of Nanomaterials and Biostructures, 6/1 (2011) 2007-2012.

 

Title: PZT films prepared by TVA and PLD from PbO(2):TiO(2):ZrO(2) (1:1:1) nanoceramic targets

Abstract: Lead zirconate titanate (PZT) thin films on Si single crystal were prepared by two techniques: a) thermionic vacuum arc (TVA) and b) pulsed laser deposition (PLD), using ceramic targets made of PbO(2), ZrO(2) and TiO(2) nanopowders. Structural characterisation of the samples by XRD, EDS and micro-Raman spectroscopy reveals combinations of PZT and its constituent oxides resulting from either experiment. Morphology studies carried out by SEM and AFM remark a smoother surface for the PLD films than for the TVA ones. A comparison between the ablated and the raw zones of the PLD target leads to the conclusion that the laser-ceramic interaction eases the PZT synthesis.

Key words: PZT; thermmionic vacuum arc deposition; Pulsed laser deposition; Raman spectroscopy; Thin films; Structural characterisation

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