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V. Braic, A. Kiss, I. Ioachim, M. Toacsan, L. Nedelcu, M. Braic, Barium magnesium tantalate thin films deposited by RF-magnetron sputtering from a stoichiometric target, J. Optoelectron. Adv. Mater., 12/12 (2010) 2380-2385.

 

Title: Barium magnesium tantalate thin films deposited by RF-magnetron sputtering from a stoichiometric target

Abstract: Barium magnesium tantalate thin films are attractive materials for high-performance dielectric ceramics for microwave devices, exhibiting a high dielectric constant, a low loss and a near-zero temperature coefficient. We report on the successful deposition of polycrystalline barium magnesium tantalate thin films by RF magnetron sputtering method. The structural and morphological characterization data are presented.

Key words:  Ceramic films; RF magnetron sputtering; Crystallographic structure; Elemental composition; Films' morphology

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