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N. C. Zoita, C. Besleaga, L. Braic, T. Mitran, C. Grigorescu, L. Nedelcu, InN thin films deposited on flexible substrates by reactive RF-magnetron sputtering, Optoelectron. Adv. Mat., 2/11 (2008) 719-720 

 

Title: InN thin films deposited on flexible substrates by reactive RF-magnetron sputtering

Abstract: Indium nitride is an attractive semiconductor material for optoelectronic applications, high-speed electronics and solar cells. We report successful deposition of polycrystalline InN thin films onto kapton polyimide flexible substrates by reactive RF magnetron sputtering method. The optical, structural and morphological characterization data are presented.

Key words:  Indium nitride; flexible substrate; RF-magnetron sputtering

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