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M. Balaceanu, E.Grigore, F. Truica-Marasescu, D.Pantelica, F.Negoita, G. Pavelescu, F.Ionescu, Characterization of carbon nitride films deposited by hollow cathode discharge process, Nuclear Instruments & Methods in Physics Research Section B-Beam Interactions with Materials and Atoms, 61 (2000) 1002-1006

 

Title: Characterization of carbon nitride films deposited by hollow cathode discharge process

Abstract: Elastic recoil detection analysis (ERDA) has been applied to determine the composition of carbon nitride and hydrogenated carbon nitride films prepared by hollow cathode discharge process. The films were deposited on Si (111) substrates. The films were also characterized by Fourier transform infrared spectroscopy (FTIR). The influence of the main deposition parameters (substrate bias voltage, nitrogen injection mode) on the film properties was investigated. (C) 1000 Elsevier Science B.V. All rights reserved. 

Keywords: IBA techniques; carbon nitride; FTIR; ERDA

Author: G. Pavelescu

 
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